摘要 |
<p>OXYGEN GETTER LAYER FOR PHOTOVOLTAIC DEVICES AND METHODS OF THEIR MANUFACTURE Methods are generally disclosed for forming a thin film photovoltaic device (10). According to one embodiment, a transparent conductive oxide layer (14) and an oxygen getter layer (13, 15) can be formed on a transparent substrate (12). The transparent conductive oxide layer (14) and the oxygen getter layer (13, 15) can then be annealed together such that oxygen 0 atoms move from the transparent conductive oxide layer (14) into the oxygen getter layer (13, 15). A photovoltaic heterojunction can be formed on the TCO layer (14). Thin film photovoltaic devices (10) are also generally disclosed. 32 Forming a TCO layer on a glass substrate 34 Forming a bottom oxygen getter layer on the TCO layer 36 Annealing the TCO layer and the bottom oxygen getter layer together to transfer oxygen atoms from the TCO layer into the bottom oxygen getter layer 38 Optionally, forming a RTB layer on the TCO layer 40 Forming a photovoltaic heterojunction on the TCO layer Fig. 5 42 Forming a top oxygen getter layer on 41 a glass substrate 44 Forming a TCO layer on the top oxygen getter layer Annealing the TCO layer and the top 46 oxygen getter layer together to transfer oxygen atoms from the TCO layer into the top oxygen getter layer Optionally, forming a RTB layer on the TCO layer Forming a photovoltaic heterojunction on the TCO layer Fig. 6</p> |