发明名称 METHOD OF DETECTING OUTER DIAMETER SIZE OF CUTTING BLADE
摘要 <P>PROBLEM TO BE SOLVED: To provide a technology for easily detecting outer diameter sizes of respective cutting blades constituting a multiblade to allow the multiblade to be positioned in a Z-axis direction of in a short time without complicating a configuration in a cutting device including the multiblade. <P>SOLUTION: The method of detecting an outer diameter size of a cutting blade includes: a cutter mark forming step of lowering a cutting means from above a workpiece whose outer diameter size is detected and positioning it at a predetermined height thereby cutting a plurality of cutting blades into the workpiece whose outer diameter size is detected and positioning it and forming a plurality of cutter marks on the workpiece whose outer diameter size is detected and positioning it; a length detecting step of imaging the plurality of cutter marks to detect lengths of the respective cutter marks; and an outer diameter size calculating step of calculating outer diameter sizes of the respective cutting blades from the length of each cutter mark detected in the length detecting step and a distance from an axial height of a spindle to an upper surface height of the workpiece whose outer diameter size is detected. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2013027949(A) 申请公布日期 2013.02.07
申请号 JP20110165254 申请日期 2011.07.28
申请人 DISCO CORP 发明人 TANAKA HIDEAKI
分类号 B24B49/12;B23Q17/24;H01L21/301 主分类号 B24B49/12
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