PROBE UNIT

摘要

Provided is a probe unit whereby reliable conduction can be obtained between the probe unit and a subject to be in contact with. The probe unit has a plurality of probe groups (2), each of which is configured of two or more contact probes (2a) that are to be brought into contact with, on one end side in the longitudinal direction, one electrode of the subject. The contact probes (2a) are to be respectively in contact with, on the other end side, different electrodes of a substrate. Each of the contact probes (2a) has: a leading end portion (21a), which is provided on the one end side in the longitudinal direction, has a plurality of claw sections (21b), each of which has a tapered leading end shape, and is to be brought into contact with, by means of the claw sections (21b), the electrode of the subject; a second contact section, which is provided on the other end side in the longitudinal direction, and is to be brought into contact with the corresponding substrate electrode; and a coil spring (23), which is provided between the leading end portion (21a) and the second contact section, and presses the leading end portion (21a) and the second contact section.