发明名称 |
MICROELECTROMECHANICAL GYROSCOPE WITH SELF-CALIBRATION FUNCTION AND METHOD OF CALIBRATING A MICROELECTROMECHANICAL GYROSCOPE |
摘要 |
A microelectromechanical gyroscope having a supporting structure; a mass capacitively coupled to the supporting structure and movable with a first degree of freedom and a second degree of freedom, in response to rotations of the supporting structure about an axis; driving components, for keeping the mass in oscillation according to the first degree of freedom; a read interface for detecting transduction signals indicating the capacitive coupling between the mass and the supporting structure; and capacitive compensation modules for modifying the capacitive coupling between the mass and the supporting structure. Calibration components detect systematic errors from the transduction signals and modify the capacitive compensation modules as a function of the transduction signals so as to attenuate the systematic errors.
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申请公布号 |
US2013031950(A1) |
申请公布日期 |
2013.02.07 |
申请号 |
US201213648215 |
申请日期 |
2012.10.09 |
申请人 |
STMICROELECTRONICS S.R.L.;STMICROELECTRONICS S.R.L. |
发明人 |
DONADEL ANDREA;UNGARETTI TOMMASO;CAMINADA CARLO;PRANDI LUCIANO |
分类号 |
G01C25/00 |
主分类号 |
G01C25/00 |
代理机构 |
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代理人 |
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地址 |
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