| 摘要 |
In this &thetas;Z drive apparatus, at least three coil portions are arranged to be capable of driving a stage in a direction Z, a direction &thetas;x which is a rotation direction employing a direction X in a horizontal plane as a center line of rotation, and a direction &thetas;y which is a rotation direction employing a direction Y in the horizontal plane orthogonal to the direction X as a center line of rotation.
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