发明名称 |
SYSTEM AND METHOD FOR GENERATING EXTREME ULTRAVIOLET LIGHT, AND LASER APPARATUS |
摘要 |
<p>An extreme ultraviolet light generation system used with a laser apparatus may be provided, and the extreme ultraviolet light generation system may include: a chamber including at least one window for at least one laser beam and a target supply unit for supplying a target material into the chamber; and at least one polarization control unit, provided on a laser beam path, for controlling a polarization state of the at least one laser beam.</p> |
申请公布号 |
EP2554027(A1) |
申请公布日期 |
2013.02.06 |
申请号 |
EP20110716318 |
申请日期 |
2011.03.25 |
申请人 |
GIGAPHOTON INC. |
发明人 |
YANAGIDA, TATSUYA;WAKABAYASHI, OSAMU |
分类号 |
H05G2/00 |
主分类号 |
H05G2/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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