CHAMBER MODULE HAVING SAMPLE STAGE

摘要

PURPOSE: A vacuum chamber module with a sample stage is provided to accurately set a sample in the vacuum chamber by using a rotary motion module and a linear motion module. CONSTITUTION: A vacuum chamber(21) maintains vacuum. A linear motion module(22) is combined with the inner part of the vacuum chamber. The linear motion module includes a linear stage(221) combined with a motor device(222) and a rotary shaft of the motor device. A rotary motion module(23) is driven by the operation of the linear motion module. A sample stage(24) is combined with the upper part of the rotary motion module.