发明名称 |
Image sensor having wave guide and method for manufacturing the same |
摘要 |
An image sensor having a wave guide includes a semiconductor substrate formed with a photodiode and a peripheral circuit region; an anti-reflective layer formed on the semiconductor substrate; an insulation layer formed on the anti-reflective layer; a wiring layer formed on the insulation layer and connected to the semiconductor substrate; at least one interlayer dielectric stacked on the wiring layer; and a wave guide connected to the insulation layer by passing through the interlayer dielectric and the wiring layer which are formed over the photodiode.
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申请公布号 |
US8368158(B2) |
申请公布日期 |
2013.02.05 |
申请号 |
US20100758646 |
申请日期 |
2010.04.12 |
申请人 |
SILICONFILE TECHNOLOGIES INC.;JEON IN-GYUN;OH SE-JUNG;AHN HEUI-GYUN;WON JUN-HO |
发明人 |
JEON IN-GYUN;OH SE-JUNG;AHN HEUI-GYUN;WON JUN-HO |
分类号 |
H01L31/0232 |
主分类号 |
H01L31/0232 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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