发明名称 Method and system for internal layer-layer thermal enhancement
摘要 The exemplary embodiments of the present invention provide a method and apparatus for enhancing the cooling of a chip stack of semiconductor chips. The method includes creating a first chip with circuitry on a first side and creating a second chip electrically and mechanically coupled to the first chip by a grid of connectors. The method further includes creating a cavity in a second side of the first chip between the connectors and filling the cavity with a thermal material. The chip stack of semiconductor chips with enhanced cooling apparatus includes a first chip with circuitry on a first side and a second chip electrically and mechanically coupled to the first chip by a grid of connectors. The apparatus further includes wherein portions of a second side of the first chip between the connectors is removed to provide a cavity in which a thermal material is placed.
申请公布号 US8367478(B2) 申请公布日期 2013.02.05
申请号 US201113151672 申请日期 2011.06.02
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION;BARTLEY GERALD K.;JOHNSON CHARLES L.;KELLY, III JOHN E.;MOTSCHMAN DAVID R. 发明人 BARTLEY GERALD K.;JOHNSON CHARLES L.;KELLY, III JOHN E.;MOTSCHMAN DAVID R.
分类号 H01L21/50;H01L21/48;H01L23/34;H01L23/40;H01L23/48;H01L23/52;H01L23/538 主分类号 H01L21/50
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