| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a semiconductor light-emitting element, in which light extraction efficiency is improved by a simple process. <P>SOLUTION: A method for manufacturing a semiconductor light-emitting element includes the steps of: providing a substrate having a first principal surface and a second principal surface facing each other; forming a plurality of columnar protrusions on the first principal surface of the substrate; forming a light-emitting laminate including a first conductivity type semiconductor layer, an active layer and a second conductivity type semiconductor layer, on the first principal surface having the protrusions formed thereon; forming a plurality of light-emitting structures by removing portions formed in regions corresponding to grooves around the protrusions, of the light-emitting laminate; and dividing the substrate along the grooves so as to obtain individual elements from the plurality of light-emitting structures formed on the substrate. <P>COPYRIGHT: (C)2013,JPO&INPIT |
