CONE-JET MODE ELECTROSTATIC SPRAY DEPOSITION APPARATUS

摘要

PURPOSE: A cone-jet mode electrostatic spray apparatus is provided to guide spray flow and to block the air flow in the opposite direction to stably maintain the spray state of a cone-jet spray nozzle. CONSTITUTION: A cone-jet mode electrostatic spray apparatus comprises a cone-jet spray nozzle(200), a high-voltage applying unit(300), and a spray guiding unit(400). The cone-jet spray nozzle receives the precursor in a liquid state from the separate supplier(100) and sprays the precursor to a substrate in an aerosol state through a nozzle block(220). The high-voltage applying unit applies high voltage to make the precursor be charged. The guide spray unit surrounds the outer circumference of the cone jet injection nozzle. The guide spray unit discharge gas along the spray direction of the cone-jet spray nozzle from the outer circumference of the cone-jet nozzle. [Reference numerals] (300) High-voltage applying unit; (421) Gas flux adjusting unit