| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve inspection accuracy of an image inspection. <P>SOLUTION: In an image inspection device, an image is picked up by an imaging part, an inspection image is acquired, and a reference image is generated based on original image data. In a first integration part, values of pixels aligned in an image recording direction in the reference image are integrated, and reference integrated value distribution is acquired. In a second integration part, values of pixels aligned in an image recording direction in the inspection image are integrated, and inspection integrated value distribution is acquired. In a sensitivity correction part, sensitivity correction for relatively approximating a plurality of integrated values except a local peak of inspection integrated value distribution 60 to a plurality of integrated values to which the reference integrated value distribution corresponds based on ratio between the inspection integrated value distribution after removing the local peak of the inspection integration value distribution and the reference integrated value distribution is performed. In a comparison part, the reference integrated value distribution is subtracted from inspection integrated value distribution 62 after the sensitivity correction, and a defect is detected. Thus, in an image inspection part, inspection accuracy is improved by performing the sensitivity correction to the inspection integrated value distribution 60. <P>COPYRIGHT: (C)2013,JPO&INPIT |
