| 摘要 |
<P>PROBLEM TO BE SOLVED: To form an optical waveguide with good crystallinity on a thermal insulation layer pattern comprising an insulator. <P>SOLUTION: A buried layer 3 is formed on a thermal insulation layer pattern 2 comprising an insulator by epitaxial growth utilizing a semiconductor crystal plane 1A on a substrate 1 exposed from the thermal insulation layer pattern 2 as a nuclei. The buried layer 3 is epitaxially grown in the lateral direction on the thermal insulation layer pattern 2, and thereby, the thermal insulation layer pattern 2 is buried. Since the buried layer 3 can be formed on the thermal insulation layer pattern 2 by epitaxial growth, an optical waveguide 10 comprising a semiconductor crystal can be formed on the thermal insulation layer pattern 2. <P>COPYRIGHT: (C)2013,JPO&INPIT |
