AUTOMATIC DETERMINATION METHOD FOR INSPECTION CONDITION/MEASUREMENT CONDITION OF SAMPLE, AND SCANNING MICROSCOPE

摘要

PROBLEM TO BE SOLVED: To solve a problem that proper setting of an irradiation condition is dependent on the discretion of the operator by visually recognizing an image captured after the pre-dose, that is, the setting of an irradiation condition is dependent on individual skills, in preliminary charge (pre-dose) that is used in the inspection or measurement of a pattern having high-aspect-ratio in the depth direction.

SOLUTION: A captured image is analyzed while changing an irradiation condition of an electron beam that is used for preliminary charge (pre-dose), and a proper irradiation condition is quantitatively and automatically determined on the basis of the analysis result.

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