发明名称 FINE STRUCTURE TRANSFER DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a fine structure transfer device capable of preventing the damage of a resin film that occurs when demolding after pressing the resin film to a mother stamper. <P>SOLUTION: The fine structure transfer device includes the mother stamper 12 formed with a fine uneven pattern on a surface 12a; a fixing frame 14 fixing the periphery of the mother stamper 12 detachably; and a support body for supporting the resin film 18 to face the fixing frame 14 and the surface 12a, having the fine uneven pattern, of the mother stamper. A level difference of an abutting or adjoining part of the mother stamper and fixing frame between the surface, having the fine uneven pattern, of the mother stamper and the surface, facing the resin film, of the fixing frame, is less than the thickness of the resin film. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2013022929(A) 申请公布日期 2013.02.04
申请号 JP20110162724 申请日期 2011.07.26
申请人 BRIDGESTONE CORP 发明人 SEGUCHI EISEI;SUZUKI TAKAHIRO
分类号 B29C59/02;B29C33/38;B29C43/02;H01L21/027 主分类号 B29C59/02
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