| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a polishing method capable of economically and hygienically polishing the side of a hard brittle material substrate while preventing chipping or cracking. <P>SOLUTION: An elastic abrasive 20 having abrasive grains 22 dispersed or adhered onto an elastic base material 21 is sprayed toward the side of a substrate 10' together with compressed air. The spray of the elastic abrasive is performed to a predetermined processing area F around a processing point P in a spray direction D intersecting a width-directional line W at the processing point P and forming a predetermined inclination θ selected from the range of 2-60° relative to a contact line T. The processing area F is moved in the circumferential direction of the workpiece 10 at a fixed rate, and the spray nozzle 30 and the workpiece are relatively moved so that the spray direction D is maintained at each processing point P' where processing area is moved. When the substrate 10' is processed in an overlapped state, the processing area F is moved at a fixed rate also in the width direction of the substrate 10'. <P>COPYRIGHT: (C)2013,JPO&INPIT |
