APPARATUS AND METHOD FOR OBTAINING SURFACE PROFILOMETRY AND THREE DIMENSIONAL SURFACE CONTOUR

摘要

APPARATUS AND METHOD FOR OBTAINING SURFACE PROFILOMETRY AND THREE DIMENSIONAL SURFACE CONTOURS Phase measurements of deformed grating images are used in performing improved optical profilometry. In one embodiment, phase differences between images of an object and a reference plane are used to obtain a measure of the object height. In another embodiment, line profiles are obtained at a series of rotational increments of a body. A full 360 degree surface profile, or a portion thereof, can then be generated.