MEASUREMENT OF CAPACITANCE OF SEMICONDUCTOR DEVICE,申请号JP19880296676-传众专利搜索

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发明名称	MEASUREMENT OF CAPACITANCE OF SEMICONDUCTOR DEVICE
摘要
申请公布号	JPH02141677(A)	申请公布日期	1990.05.31
申请号	JP19880296676	申请日期	1988.11.22
申请人	NEC CORP	发明人	OWADA SATOSHI
分类号	G01R31/26;H01L21/66	主分类号	G01R31/26
代理机构		代理人
主权项
地址

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