DRY ETHCING AGENT

摘要

[Problem] To provide a dry etching agent having little effect on the global environment but having the required performance. [Solution] Provided is a dry etching agent comprising, each at a specific vol%, (A) a fluorine-containing unsaturated hydrocarbon represented by the formula CaFbHc (where a, b and c are each positive integers and satisfy the correlation of 2 a 5, c > 1, 2a + 2 > b + c, b a + c, excluding the case where a = 3, b = 4, or c = 2), (B) at least one gas selected from the group consisting of O2, O3, CO, CO2, COCl2, COF2, F2, NF3, Cl2, Br2, I2, and YFn (where Y is Cl, Br or I and n is an integer between 1 and 5), and (C) at least one gas selected from the group consisting of N2, He, Ar, Ne, Xe, and Kr.