PHOTONIC MEMS AND STRUCTURES

摘要

PURPOSE: A photonic MEMS system and a structure are provided to improve controllability of an optical switch by relatively moving two optical layers having reflectivity. CONSTITUTION: A glass layer(102) is combined with a glass substrate(106). An anti-reflection coating(100) is precipitated on a surface of the glass layer. The anti-reflection coating includes at least one thin film. An interference modulator array is processed on the opposite side of the glass layer. The incident is processed in the array.