| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an electric field probe which has high spatial resolution and excellent high frequency property, and can be easily manufactured. <P>SOLUTION: The electric field probe includes a sensor electrode 44, a signal line 38 connected to the sensor electrode, a pair of ground layer 34 and 38 sandwiching the sensor electrode and the signal line, and shield patterns 36 and 40 arranged between one of the pair of ground layers and the signal line and connected to the pair of ground layers. The shield patterns face at least the sensor electrode, and do not face portions of the signal line except portions adjacent to the sensor electrode. <P>COPYRIGHT: (C)2013,JPO&INPIT |
