发明名称 TRANSFER ROBOT
摘要 <P>PROBLEM TO BE SOLVED: To provide a transfer robot in which variance in a height position of a robot hand measured along a vertical direction is suppressed, the variance being caused by bending of robot arms during the elongation/contraction of the robot arms, and which can be made light in weight. <P>SOLUTION: At least a part of the total length of the robot arms 11 along the longitudinal direction L of respective arm parts 21a and 21b is formed into a shape comprising a first area E1 where the shape of a section spread vertically to the longitudinal direction L is rectangular and a second area E2 projected perpendicularly from one long side W1 of the rectangle. For example, the cross section is formed into a roughly T shape in which the second rectangular area E2 projects centered on the center of one long side W1 of the rectangle of the first area E1. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2013018058(A) 申请公布日期 2013.01.31
申请号 JP20110151005 申请日期 2011.07.07
申请人 ULVAC JAPAN LTD;ULVAC TECHNO LTD 发明人 MUKAIDE MASASHI;SHIRAI HIDEJI;SAITO KAZUHIKO;MATSUO HIROSHI
分类号 B25J9/06;H01L21/677 主分类号 B25J9/06
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