发明名称 PROCESS CONDITION MEASURING DEVICE
摘要 An instrument comprises a substrate, a plurality of sensors distributed at positions across the substrate's surface, at least one electronic processing component on the surface, electrical conductors extending across the surface and connected to the sensors and processing component, and a cover disposed over the sensors, processing component and conductors. The cover and substrate have similar material properties to a production substrate. The cover is configured to electromagnetically shield the sensors, conductors, or processing component. The instrument has approximately the same thickness and/or flatness as the production substrate. It is emphasized that this abstract is provided to comply with rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.
申请公布号 US2013029433(A1) 申请公布日期 2013.01.31
申请号 US201213361869 申请日期 2012.01.30
申请人 KLA-TENCOR CORPORATION;SUN MEI H.;WILTSE MARK;RENKEN WAYNE G.;REID ZACHARY;DIBIASE TONY 发明人 SUN MEI H.;WILTSE MARK;RENKEN WAYNE G.;REID ZACHARY;DIBIASE TONY
分类号 H01L21/66;G01N19/00;G01N21/00;G01N27/00;G01N33/00;H05K3/30 主分类号 H01L21/66
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