| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an observation device, which includes magnification-changeable optical elements at a plurality of positions, with favorable operability in which a desired total magnification can be achieved without mutually considering magnifications of the optical elements. <P>SOLUTION: An observation device includes: an optical system that obtains an optical image of a specimen through a first optical element and a second optical element; first optical element change means that performs discrete change of magnification of the first optical element; detection means that detects discrete change of the magnification of the first optical element; zoom driving means that changes magnification of the second optical element at a pitch smaller than the first optical element; and control means that controls the first optical element change means and the zoom driving means in synchronization with each other. When discrete change of the magnification of the first optical element is performed, the control means causes the zoom driving means to synchronize and performs control of changing the magnification of the second optical element so that a total magnification constituted of the combination of the magnification of the first optical element and the magnification of the second optical element is not changed before and after discrete change. <P>COPYRIGHT: (C)2013,JPO&INPIT |
