X-RAY UTILIZING INSPECTION INSTRUMENT, X-RAY LINE SENSOR USED FOR THE INSTRUMENT, AND ITS MANUFACTURE

摘要

PURPOSE:To improve the detecting capability by using the X-ray line sensor which uses a scintillator formed by forming unevenness on a fluorescent material layer. CONSTITUTION:The X-ray line sensor 1A consists of the scintillator 10a formed by forming the unevenness 101 on the fluorescent material layer. This sensor 1A converts X rays which are transmitted through a body to be inspected into visible light by the scintillator 11 and the light is made incident on and converted by the photodiode array of the element 11 into an electric signal, which is outputted. At this time, the light which is converted from the X rays to the visible light by the X-ray fluorescent plate 10 of the scintillator 10a is propagated principally in a groove 102 before being absorbed or attenuated, and made incident on the element 11.