发明名称 Method for fabricating a DRAM cell
摘要 This invention is related to a method for fabricating a DRAM cell. This invention makes the capacitor electrode and the source of the transistor connect more easily using the lateral diffusion of another dopant having higher diffusivity and same impurity type, which is added to the first ion implantation for the first electrode of storage capacitor. According to this invention the storage capacitor electrode and the source of the transistor are connected successfully, and it is possible to reduce the resistance between the capacitor electrode and the drain of the transistor.
申请公布号 US4997774(A) 申请公布日期 1991.03.05
申请号 US19890412591 申请日期 1989.09.25
申请人 SAMSUNG SEMICONDUCTOR AND TELECOMMUNICATIONS CO., LTD. 发明人 KIM, KI N.
分类号 H01L27/00;H01L21/8242 主分类号 H01L27/00
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