| 摘要 |
<P>PROBLEM TO BE SOLVED: To pass a liquid to an inner tank drain pipeline at the time of temperature control after the liquid exchange so as to prevent an adverse effect on a waste fluid facility and to prevent an adverse effect on a device and process failure. <P>SOLUTION: After a controlling unit 33 discharges an old phosphoric acid solution, a new phosphoric acid solution is fed to a processing tank 1. The temperature control of the phosphoric acid solution is performed as the phosphoric acid solution is circulated with a pump AP in a normal circulation passage from an outer tank 5, through a circulation pipeline 7 to an inner tank 3, and a process liquid is circulated in a temporary passage passing through an inner tank drain pipeline 11 at least once by the completion of the temperature control. Therefore, even if the old phosphoric acid solution is left in the inner tank drain pipeline 11, the old phosphoric acid solution can be replaced by a new phosphoric acid solution. As a result, this can prevent an adverse effect resulting from the old phosphoric acid solution left in the inner tank drain pipeline 11 on a waste fluid facility. <P>COPYRIGHT: (C)2013,JPO&INPIT |
