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发明名称
摘要
申请公布号
JP5132722(B2)
申请公布日期
2013.01.30
申请号
JP20100137011
申请日期
2010.06.16
申请人
发明人
分类号
H01L21/02;H01L21/336;H01L27/12;H01L29/786
主分类号
H01L21/02
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