发明名称 Manufacturing method of probe card and the probe card
摘要 A manufacturing method for probe card according to the present invention includes following processes. A film is formed on the surface of a circuit board. A connecting terminal and joint member are formed by etching the film, and the surface of the joint member is polished. An inspection contacting structure is assembled. The inspection contacting structure is moved proximity to a circuit board. The lower surface of a contactor and joint member are attached so as to contact the front end of a probe penetrating and passing through the contactor to the connecting terminal.
申请公布号 US8362792(B2) 申请公布日期 2013.01.29
申请号 US20080315745 申请日期 2008.12.05
申请人 TOKYO ELECTRON LIMITED;MOCHIZUKI JUN 发明人 MOCHIZUKI JUN
分类号 G01R31/00 主分类号 G01R31/00
代理机构 代理人
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