发明名称 METHOD AND DEVICE FOR PRODUCING ORIENTED SOLIDIFIED BLOCKS MADE OF SEMI-CONDUCTOR MATERIAL
摘要 A method and a device for producing oriented solidified blocks made of semi-conductor material are provided. The device includes a crucible, in which melt is received, and has an insulation which surrounds the crucible at least from the top and from the side and which is arranged at a distance therefrom at least above the crucible, and at least one heating device which is arranged above the crucible. The region inside the insulation above the crucible is divided by an intermediate cover in a process chamber and a heating chamber is arranged thereabove, where at least one heating element is arranged.
申请公布号 KR101227563(B1) 申请公布日期 2013.01.29
申请号 KR20077020137 申请日期 2006.02.03
申请人 发明人
分类号 H01L21/02;H01L21/324 主分类号 H01L21/02
代理机构 代理人
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