发明名称 |
Stress-inducing structures, methods, and materials |
摘要 |
Stress-inducing structures, methods, and materials are disclosed. In one embodiment, an isolation region includes an insulating material in a lower portion of a trench formed in a workpiece and a stress-inducing material disposed in a top portion of the trench over the insulating material.
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申请公布号 |
US8361879(B2) |
申请公布日期 |
2013.01.29 |
申请号 |
US20080122849 |
申请日期 |
2008.05.19 |
申请人 |
INFINEON TECHNOLOGIES AG;GUTMANN ALOIS;HAMPP ROLAND;JANSEN SCOTT |
发明人 |
GUTMANN ALOIS;HAMPP ROLAND;JANSEN SCOTT |
分类号 |
H01L21/76 |
主分类号 |
H01L21/76 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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