发明名称 APPARATUS FOR DETECTING HIGHT LEVEL OF CLEANING LIQUID WITH HIGH TEMPERATURE IN CLEAN CHAMBER
摘要 PURPOSE: A device for grasping a water level of high temperature washing solution in the inside of a washing chamber is provided to stably grasp the water level of the washing solution without contacting to the washing solution. CONSTITUTION: A device(200) for grasping a water level of washing solution in the inside of a washing chamber comprises a first tubular unit(210), a drain tubular unit(220), and a second tubular unit(230). One en portion of the first tubular unit is connected to an upper end portion of a washing chamber(100) to be communicated and the other end portion of the first tubular unit is connected to a lower end portion of the washing chamber to be communicated. One end portion of the drain tubular unit is connected to a lower end portion of a vertical tubular unit(215) of the first tubular unit and the other end portion of the drain tubular unit is vertically and downwardly spread and an opening/closing valve(V1) is interposed in the middle of the drain tubular unit. One end portion of the second tubular unit is connected to an upper end portion of the vertical tubular unit to be communicated and the other end portion of the second tubular unit is connected to the middle part of the drain tubular unit in an upper stream of the opening/closing valve.
申请公布号 KR20130010195(A) 申请公布日期 2013.01.28
申请号 KR20110070830 申请日期 2011.07.18
申请人 VACUUMPLANT CO., LTD. 发明人 KIM, SANG BEOM
分类号 G01F23/02;B08B3/12 主分类号 G01F23/02
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