| 摘要 |
PURPOSE: An apparatus for generating power is provided to generate electricity by using effluent gases discharged from a process chamber, and to utilize chemical energy of the effluent gases as a new energy source. CONSTITUTION: An apparatus for generating power comprises: a mixer(210) controlling oxygen partial pressure of a waste gas by mixing moisture into an effluent gas discharged from a process chamber(290); a moisture feeder(220) supplying the moisture into the mixer; and a fuel cell(230) which comprises a fuel electrode, an electrolyte, and an oxygen electrode, and converts chemical energy of the effluent gas into electric energy by partial pressure different between the effluent gas supplied from the mixer to the fuel electrode and oxygen supplied to oxygen electrode. [Reference numerals] (210) Mixer; (220) Moisture feeder; (230) Fuel cell; (240) Control unit; (280) Monitoring unit; (290) Process chamber; (295) Scrubber; (297) Washing unit |
