发明名称 |
AUTOMATIC OPENING AND CLOSING DEVICE FOR FOUP |
摘要 |
<p>PURPOSE: An automatic foup opening and closing device is provided to reduce time and manpower by automatically opening and closing a door without the operation of a worker. CONSTITUTION: A stage(100) fixes a foup. A base plate(200) is orthogonally connected to the stage. A door connecting member is movably arranged on the rear of the base plate. A door(300) is connected to one end of the door connecting member. A door opening and closing link module is connected to the other end of the door connecting member.</p> |
申请公布号 |
KR101226746(B1) |
申请公布日期 |
2013.01.25 |
申请号 |
KR20120023029 |
申请日期 |
2012.03.06 |
申请人 |
YOO, JEONG HO;NANO SEMICON CO., LTD. |
发明人 |
YOO, JEONG HO |
分类号 |
H01L21/677;H01L21/02 |
主分类号 |
H01L21/677 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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