发明名称 AUTOMATIC OPENING AND CLOSING DEVICE FOR FOUP
摘要 <p>PURPOSE: An automatic foup opening and closing device is provided to reduce time and manpower by automatically opening and closing a door without the operation of a worker. CONSTITUTION: A stage(100) fixes a foup. A base plate(200) is orthogonally connected to the stage. A door connecting member is movably arranged on the rear of the base plate. A door(300) is connected to one end of the door connecting member. A door opening and closing link module is connected to the other end of the door connecting member.</p>
申请公布号 KR101226746(B1) 申请公布日期 2013.01.25
申请号 KR20120023029 申请日期 2012.03.06
申请人 YOO, JEONG HO;NANO SEMICON CO., LTD. 发明人 YOO, JEONG HO
分类号 H01L21/677;H01L21/02 主分类号 H01L21/677
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