BASE NANO-MOLD AND METHOD OF MANUFACTURING NANO-MOLD USING THE SAME
摘要
Provided are a base nano-mold and a method of manufacturing a nano-mold using the same. The base nano-mold includes a mold grid layer formed with at least one first grid pattern, and at least one second grid pattern formed on the first grid pattern. A nano-mold is manufactured by coating and curing a resin on the base nano-mold, such that manufacturing costs required for manufacturing a nano-mold can be reduced, and the nano-mold with an improved aspect ratio can be manufactured while improving an efficiency of the process.
申请公布号
WO2013012208(A2)
申请公布日期
2013.01.24
申请号
WO2012KR05563
申请日期
2012.07.13
申请人
LG INNOTEK CO., LTD.;KIM, JIN SU;YOO, KYOUNG JONG;LEE, YOUNG JAE;LEE, JUN
发明人
KIM, JIN SU;YOO, KYOUNG JONG;LEE, YOUNG JAE;LEE, JUN