PHASE PLATE, AND ELECTRON MICROSCOPE

摘要

PROBLEM TO BE SOLVED: To provide a phase plate for use in an electron microscope in which the problem of lack of image information due to blocking of an electron beam is reduced, and the problem of anisotropic potential distribution is improved.

SOLUTION: One continuous aperture 23 is provided, and a plurality of electrodes 11 are provided in the aperture to extend from the outer portion toward the center thereof. Each electrode 11 has a cross section of such a structure as a voltage application layer 24 consisting of a conductor or a semiconductor is covered with a shield layer 26 consisting of a conductor or a semiconductor with an insulation layer 25 interposed therebetween. Consequently, a phase plate in which blockage of an electron beam by the electrode 11 is reduced while improving the problem of anisotropic potential distribution is configured.

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