| 发明名称 |
Nickel Alloy Target Including a Secondary Metal |
| 摘要 |
A target includes nickel and a secondary metal. The secondary metal has a volume percentage between about 1 percent and about 10 percent. The secondary metal has a density between about 5,000 kg/m3 and about 15,000 kg/m3.
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| 申请公布号 |
US2013020617(A1) |
申请公布日期 |
2013.01.24 |
| 申请号 |
US201113188182 |
申请日期 |
2011.07.21 |
| 申请人 |
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.;CHANG SHIH-CHIEH;WANG YING-LANG;CHEN KEI-WEI |
发明人 |
CHANG SHIH-CHIEH;WANG YING-LANG;CHEN KEI-WEI |
| 分类号 |
H01L29/78;C23C14/14 |
主分类号 |
H01L29/78 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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