发明名称 NITRIDE ELECTRONIC DEVICE AND METHOD FOR MANUFACTURING THE SAME
摘要 The present disclosure relates to a nitride electronic device and a method for manufacturing the same, and particularly, to a nitride electronic device and a method for manufacturing the same that can implement various types of nitride integrated structures on the same substrate through a regrowth technology (epitaxially lateral over-growth: ELOG) of a semi-insulating gallium nitride (GaN) layer used in a III-nitride semiconductor electronic device including Group III elements such as gallium (Ga), aluminum (Al) and indium (In) and nitrogen.
申请公布号 US2013020649(A1) 申请公布日期 2013.01.24
申请号 US201213548522 申请日期 2012.07.13
申请人 ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE;BAE SUNG BUM;NAM EUN SOO;MUN JAE KYOUNG;KIM SUNG BOCK;KIM HAE CHEON;JU CHULL WON;KO SANG CHOON;LIM JONG-WON;AHN HO KYUN;CHANG WOO JIN;PARK YOUNG RAK 发明人 BAE SUNG BUM;NAM EUN SOO;MUN JAE KYOUNG;KIM SUNG BOCK;KIM HAE CHEON;JU CHULL WON;KO SANG CHOON;LIM JONG-WON;AHN HO KYUN;CHANG WOO JIN;PARK YOUNG RAK
分类号 H01L27/088;H01L21/20;H01L27/08 主分类号 H01L27/088
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