| 摘要 |
In order to reduce the size of an electromagnetic wave generating device in a plasma generating device which generates electromagnetic wave plasma by radiating electromagnetic waves to a target area, the waves having been amplified using a solid state amplification element, a plasma generating device is provided with an electromagnetic wave generating device which outputs electromagnetic waves that have been amplified using a solid state amplification element, and a radiating antenna for radiating the electromagnetic waves, outputted from the electromagnetic wave generating device, toward the target space; and the plasma generating device generates electromagnetic wave plasma by radiating the electromagnetic waves from the radiating antenna toward the target space. The plasma generating device has properties whereby the output waveform from the electromagnetic wave generating device has a peak in the leading edge, and the electromagnetic waves are outputted toward the radiating antenna without reducing the rising peak in the output waveform. |
