INSPECTION METHOD OF SEMICONDUCTOR ELEMENT, AND SEMICONDUCTOR INSPECTION DEVICE

摘要

PROBLEM TO BE SOLVED: To quickly determine presence/absence of occurrence of current collapse in a field effect transistor.

SOLUTION: An inspection method of a semiconductor element includes a first step of calculating a first on-resistance of a field effect transistor 101 under a state where the field effect transistor 101 is in an on-state and a first voltage is applied to the drain of the field effect transistor 101; a second step of applying a second voltage larger than the first voltage is applied to the drain of the field effect transistor 101 while the field effect transistor 101 is in an off-state; and calculating a second on-resistance of the field effect transistor 101 under a state where the field effect transistor 101 is in the on-state and the second voltage is applied to the drain of the field effect transistor 101.

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