| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a laser height measuring apparatus that accurately controls a measuring position, and maintains control precision of the measuring position without requiring a sensor mounting position adjustment mechanism nor a position adjustment operation. <P>SOLUTION: A laser height measuring apparatus includes: a laser height sensor 6 having a laser light radiation section 61 for radiating laser light L1 and a reflected light detection section 62 for detecting laser light reflected by an object; a sensor moving mechanism (head drive mechanism 41-43) for moving the laser height sensor 6 in a plane; an image camera (component camera 5) arranged in a predetermined calibrating position (on a light incidence axis AO); a neutral density filter 71 for attenuating and transmitting the laser light L1; laser light imaging means for positioning the laser height sensor 6 at the calibrating position AO, radiating the laser light L1 and imaging laser light transmitted through the neutral density filter 71 by means of the image camera 5 to obtain a laser light image; and correction value acquisition means for determining a value for correcting a coordinate position on the basis of the position of the laser light on the laser light image. <P>COPYRIGHT: (C)2013,JPO&INPIT |
