| 摘要 |
PROBLEM TO BE SOLVED: To provide a high-precision drawing device, related to a charged beam drawing device of a continuous stage movement method for fast continuous movement. SOLUTION: From a plurality of stage position information sampled at a constant time interval, a tracking correction coefficient (=stage movement amount/sampling time) equal to a momentary stage speed is detected, and the stage speed data is inputted in an integrator, and while controlling so that the integrator is reset for each sampling, a final output voltage is added to a beam polarization voltage for correcting a beam position.
|
