| 摘要 |
PROBLEM TO BE SOLVED: To inexpensively produce a highly pure nitrogen by converting impurity oxygen included in the nitrogen gas into nitrous oxide, and removing the obtained nitrous oxide by absorption. SOLUTION: A liquid nitrogen 2 produced by a low temperature process and containing impurity oxygen is fed from a storing vessel 1 through valves 8, 8 to a gas-treating unit 5. The impurity oxygen is converted to nitrous oxide in a step for taking out N2 gas by evaporating the liquid nitrogen. The resultant nitrous oxide is allowed to be absorbed by a zeolite cooled by the liquid nitrogen, and the obtained highly pure nitrogen is taken out through a mass-flow controller 4. The regeneration of the zeolite is carried out in a regeneration unit uncharged with the liquid nitrogen during the impurity oxygen-removing treatment. A plurality of metal electrodes for generating silent discharge, dielectric substances, radial metal spacers, filters for preventing dispersion of zeolite particles, and unit cells having pipes for an outlet gas with zeolite pellets attached thereto is arranged in the gas-treating unit 5.
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