摘要 |
PROBLEM TO BE SOLVED: To suppress deterioration in yield due to that the variance of the pattern processing depending on the variance of a manufacturing process for a semiconductor device exceeds an allowable range. SOLUTION: This semiconductor device comprises a correction discrimination detection circuit 11 for generating a detection signal if the variance of the pattern processing exceeds a predetermined allowable range while monitoring the variance of the pattern processing depending on the variance of the manufacturing process, and a characteristic correction circuit 12 for correcting electric characteristics of the subject circuit based on the detection signal of the correction discrimination detection circuit.
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