发明名称 NORBORNENE-BASED COPOLYMER FOR PHOTORESIST, METHOD FOR PREPARING THE SAME, AND PHOTORESIST COMPOSITION COMPRISING THE SAME
摘要 PURPOSE: Provided are a norbornene-based copolymer for photoresist, a method for preparing the same, and a photoresist composition comprising the same, wherein the photoresist composition can form a pattern profile excellent in resolution and adhesion to substrate. CONSTITUTION: The norbornene-based copolymer, particularly 5-norbonene-2-alkane-1,3-dion derivative is represented by formula 1b(wherein R1 is C1-C12, linear, branched, or cyclic alkyl group, R2 is hydrogen atom, or C1-C6, linear, branched or cyclic alkyl group, R3, R4 and R5 are independently hydrogen atom, or C1-C6, linear, branched or cyclic alkyl group, and R1 and R5 together form a cyclic diketone, each of R6 and R7 is independently C1-C6 alkyl group, and R6 and R7 together form a ring, and p is an integer of 0-6).
申请公布号 KR20030036948(A) 申请公布日期 2003.05.12
申请号 KR20010067898 申请日期 2001.11.01
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 HAN, EUN SIL;HAN, UK;MUN, BONG SEOK;SHIN, JUNG HAN
分类号 G03F7/027;C07B61/00;C07C45/45;C07C49/255;C07C49/553;C07C49/577;C07D317/26;C07D319/06;C08F32/08;G03F7/039;(IPC1-7):G03F7/027 主分类号 G03F7/027
代理机构 代理人
主权项
地址
您可能感兴趣的专利