PIPE CONNECTING STRUCTURE AND SUBSTRATE PROCESSING APPARATUS HAVING THE SAME

摘要

PURPOSE: A pipe connecting structure and a substrate processing apparatus including the same are provided to minimize abrasion by absorbing impacts through bellows when a first pipe is connected to a second pipe. CONSTITUTION: A first flange part(110) is installed in the end of a first pipe(10). A second flange part(120) is installed in the end of a second pipe(20). The second flange part connects a first pipe to a second pipe by closely adhering to the first flange part. A contraction unit is combined with the second flange part to apply elastic force to the first flange part and includes a fixed flange part(210), bellows(220), and one or more elastic members(230). The fixed flange part is connected to the second flange part by the bellows.