发明名称 |
Vacuum deposition apparatus |
摘要 |
Disclosed is a vacuum deposition apparatus which suppresses mutual interference of magnetic fields generated by multiple magnetic-field applying mechanisms for evaporation sources. The vacuum deposition apparatus includes a deposition chamber; a magnetic-field applying mechanism of sputtering evaporation source disposed in the deposition chamber, a magnetic-field applying mechanism of arc evaporation source disposed in the same deposition chamber; and magnetic-field shielding units arranged so as to cover partially or entirely at least one of these magnetic-field applying mechanisms for evaporation sources (preferably the magnetic-field applying mechanism of sputtering evaporation source). Portions (portions to face a target material upon closing) of openable units of magnetic-field shielding units are preferably made from a non-magnetic material. |
申请公布号 |
EP2548992(A1) |
申请公布日期 |
2013.01.23 |
申请号 |
EP20120004988 |
申请日期 |
2012.07.05 |
申请人 |
KABUSHIKI KAISHA KOBE SEIKO SHO (KOBE STEEL, LTD.) |
发明人 |
YAMAMOTO, KENJI;HIROTA, SATOSHI |
分类号 |
C23C14/32;C23C14/34;C23C14/35;C23C14/50;H01J37/32;H01J37/34 |
主分类号 |
C23C14/32 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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