发明名称 COMPOSITION FOR REMOVING A PHOTORESIST COMPRISING CORROSION INHIBITOR
摘要 <p>PURPOSE: A composition for removing photoresist is provided to have excellent corrosion resistance for a copper wire, low adsorption amount, and sufficient cleaning performance. CONSTITUTION: A composition for removing photoresist comprises a compound indicated in chemical formula 1. In chemical formula 1, R1 is a hydrogen atom, C1-10 linear or branched alkyl group, carboxyl group, an amino group, a hydroxy group, a cyano group, a formyl group, a sulfonyl alkyl group, or a sulfonyl group, R2 is C1-6 linear or branched alkylene group, and R3 and R4 is independently a hydroxyl group, or a C1-6 linear or branched hydroxyl alkyl group.</p>
申请公布号 KR20130008106(A) 申请公布日期 2013.01.22
申请号 KR20110063955 申请日期 2011.06.29
申请人 LG CHEM. LTD. 发明人 PARK, MIN CHOON;MIN, SUNG JOON;YOU, JUNG SUN;KIM, KYUNG JUN
分类号 G03F7/42;H01L21/027 主分类号 G03F7/42
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