发明名称 Substrate Contact Opening
摘要 An under-bump metallization (UBM) structure for a substrate, such as an organic substrate, a ceramic substrate, a silicon or glass interposer, a high density interconnect, a printed circuit board, or the like, is provided. A buffer layer is formed over a contact pad on the substrate such that at least a portion of the contact pad is exposed. A conductor pad is formed within the opening and extends over at least a portion of the buffer layer. The conductor pad may have a uniform thickness and/or a non-planar surface. The substrate may be attached to another substrate and/or a die.
申请公布号 KR101224728(B1) 申请公布日期 2013.01.21
申请号 KR20100110384 申请日期 2010.11.08
申请人 发明人
分类号 H01L21/60;H01L23/48 主分类号 H01L21/60
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