CORROSION RESISTANCE, DURABILITY OF ABRASION, SURFACE TREATMENT METHOD FOR PLASMA PROCESSES

摘要

PURPOSE: A method for processing a plasma process component for improving corrosion resistance and abrasion resistance is provided to supply a high surface coating method by blocking impurities in a plating process through a washing process using a nano bubble. CONSTITUTION: A preprocess is performed to remove contaminants of materials(S10). A smut of the materials without contaminants is removed(S20). An oxide layer of the materials is removed(S30). A nickel strike process is performed(S40). A nickel plating process is performed to form a barrier layer(S50). Alloy solutions of nickel, tungsten, and phosphorus are coated on the materials(S60). [Reference numerals] (AA) Start; (BB) End; (S10) Pre-processing step